Mega 960

Max Flow: 95 LPM (25 GPM)

Max Temperature: 212 °F (100 °C)

Max Pressure: 80 PSIG (0.55 MPa)

Materials: PTFE/PFA fluid path
All wetted seals are PTFE

Certifications: CE

Applications: Semiconductor/Electronics
LED/Flat Panel
Chemical Processing

The Mega 960 is ideal for high-flow recirculation or delivery applications. It features a non-stalling shuttle valve to operate reliably under high pressure and closed discharge valve conditions. This pump’s flow path is constructed entirely of PFA and PTFE to ensure the utmost high-purity pumping and chemical compatibility. The non-metallic air chamber components make this pump suitable for aggressive acid vapor environments. This is the go-to standard for high-flow chemical applications where non-stop performance is essential.
  • Reliable Operation In Various Applications Because Of Patented Non-Stall Air Logic Design
  • Safe, Pneumatic Operation With Clean, Dry Air Or Nitrogen
  • High Suction Capability Due To Patented Floating PTFE O-Ring Check Valve
  • Non-Penetrated, Double Layer PTFE Diaphragm
  • Immediate Response To System Backpressures (D-Style Control Only)
  • User Serviceable
  • Clean Room Assembled, Tested, And Packaged

  • 960E For User Defined
  • 960D For Distribution And Deadhead Capability


  • ¾” Flare Tube Adapter
  • 1″ Flare Tube Adapter
  • ¾” PFA Tube Stubout
  • 1″ PFA Pipe
  • ¾” NPT
  • 1″ NPT
  • No Adapter


  • SS85
  • SS95


  • Viton® Or FFKM Air-Side Seals
  • Cycle Probe (960D Only)
  • Remote Exhaust
  • Leak Probe
  • Magnetic Shuttle

MEGA 960 Flow Performance

MEGA 960 Dimensions